Pulse-width modulation (PWM) control and drive circuitry particularly applicable to an array of electrostatic actuators formed in a micro electromechanical system (MEMS), such as used for optical switching. The high-voltage portion may be incorporated in an integrated circuit having drive cells vertically...http://www.google.com/patents/US6961257?utm_source=gb-gplus-sharePatent US6961257 - Content addressable control system
