A method of making a fully self-aligned, planar, two phase charge coupled device comprises the steps of first forming upon a semiconductive substrate a uniform insulative layer; then implanting ions of a second conductivity type into the substrate, then patterning closely spaced strips of a first conductive...http://www.google.com/patents/US5556801?utm_source=gb-gplus-sharePatent US5556801 - Method of making a planar charge coupled device with edge aligned implants and interconnected electrodes
