The present invention provides a lamp anneal apparatus comprising: a chamber; a wafer holder accommodated in the chamber for holding a wafer to be annealed; a first set of lamps provided over a top wall of the chamber; and a second set of lamps provided under a bottom wall of the chamber, wherein the...http://www.google.com/patents/US6635852?utm_source=gb-gplus-sharePatent US6635852 - Method and apparatus for lamp anneal
