A gas distribution showerhead for uniformly distributing gas and undistorted radiant heat in an RTP chamber. A gas passageway exists within the showerhead and is suitable for connection to a source of gas. The gas passageway terminates in a plurality of gas ports on a surface of the showerhead. A plurality...http://www.google.com/patents/US6232580?utm_source=gb-gplus-sharePatent US6232580 - Apparatus for uniform gas and radiant heat dispersion for solid state fabrication processes
