A plasma treatment apparatus with improved uniformity of treatment consists of a sealed housing that can be evacuated for the supply of a working gas and that contains a group of plasma-excitation elements in the form of RF or MW antennas, which generate plasma in a confined space within the housing....http://www.google.com/patents/US20030168172?utm_source=gb-gplus-sharePatent US20030168172 - Plasma treatment apparatus with improved uniformity of treatment and method for improving uniformity of plasma treatment
