Methods of etching optical elements in association with photosensitive elements are described. In some of the arrangements, the optical elements are formed integrally with a substrate containing the photosensitive elements. In other arrangements, an optical element is mounted to a package, or the like,...http://www.google.com/patents/US5529936?utm_source=gb-gplus-sharePatent US5529936 - Method of etching a lens for a semiconductor solid state image sensor
