Faults occurring in the operation of a rapid thermal process system are detected and dynamically controlled in-situ. A data set is generated which represents the power applied to heating elements which are spatially arranged in a plurality of zones. The data is converted to a sequence of fractions respectively...http://www.google.com/patents/US6577926?utm_source=gb-gplus-sharePatent US6577926 - Method of detecting and controlling in-situ faults in rapid thermal processing systems
