Techniques of shallow trench isolation and devices produced therefrom are provided. The techniques of shallow trench isolation utilize foamed polymers, cured aerogels or air gaps as the insulation medium. Such techniques facilitate lower dielectric constants than the standard silicon dioxide due to the...http://www.google.com/patents/US6413827?utm_source=gb-gplus-sharePatent US6413827 - Low dielectric constant shallow trench isolation
