This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simultaneously capture the spectrum of both...http://www.google.com/patents/US7947951?utm_source=gb-gplus-sharePatent US7947951 - Multi-beam ion/electron spectra-microscope
