A manufacturing apparatus for a semiconductor device, treating a SiN film formed on a wafer with phosphoric acid solution, including a processing bath to store phosphoric acid solution provided for treatment of the wafer, a control unit for calculating integrated SiN etching amount of the phosphoric...http://www.google.com/patents/US8148175?utm_source=gb-gplus-sharePatent US8148175 - Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device
