An accelerometer fabricated by silicon etching techniques. A first suspended beam is formed having a first conductive portion, the beam being deflectable in response to an acceleration force. a second beam having second and third conductive portions is suspended over the first beam. Phased lock loop...http://www.google.com/patents/US4945773?utm_source=gb-gplus-sharePatent US4945773 - Force transducer etched from silicon
