(A) The surface shape of an object (1) is measured by varying the position and/or direction of measurement, and a plurality of sets of partially measured data (2) including the common parts (2a) are acquired, (B) for all the partially measured data (2), the overlapped ranges (3a) of the adjacent common...http://www.google.com/patents/US6611791?utm_source=gb-gplus-sharePatent US6611791 - Method for combining partially measured data
