In one implementation, a method for fabricating a tiered structure is provided, which includes forming a source and a drain on a substrate with a gate formed therebetween. Formation of the gate includes depositing a gate foot using a gate foot mask having an opening through it to define the gate foot...http://www.google.com/patents/US7439166?utm_source=gb-gplus-sharePatent US7439166 - Method for producing tiered gate structure devices
