A stiffener structure, a wiring substrate, and a frame having a major surface disposed in a stack can be part of a probe card assembly. The wiring substrate can be disposed between the frame and the stiffener structure, and probe substrates can be coupled to the frame by one or more non-adjustably fixed...http://www.google.com/patents/US7772863?utm_source=gb-gplus-sharePatent US7772863 - Mechanical decoupling of a probe card assembly to improve thermal response
