A corrosion inhibiting cleaning process for removing etch-residue from an integrated circuit substrate is described. The corrosion inhibiting cleaning process includes: (1) obtaining an integrated circuit substrate that has undergone etching; and (2) cleaning the integrated circuit substrate using a...http://www.google.com/patents/US6117795?utm_source=gb-gplus-sharePatent US6117795 - Use of corrosion inhibiting compounds in post-etch cleaning processes of an integrated circuit
