A system for handling stiff but flexible discs, particularly semiconductor wafers, including fail safe mechanisms that prevent the disc from being dropped if power to the unit is interrupted. Also, the electronics controlling operation resumes functioning at the point in the operation cycle existing...http://www.google.com/patents/US20030052497?utm_source=gb-gplus-sharePatent US20030052497 - INTELLIGENT INTEGRATED CIRCUIT WAFER HANDLING SYSTEM WITH FAIL SAFE SYSTEM
