A method for manufacturing a thin film transistor results in a thin film transistor including a semiconductor film, a channel region provided in the semiconductor film, source and drain regions sandwiching the channel region, and a gate electrode facing the channel region with an intermediary of a gate...http://www.google.com/patents/US20060008956?utm_source=gb-gplus-sharePatent US20060008956 - Method for manufacturing thin film transistor, electro-optical device and electronic apparatus
