A polishing technique wherein scratches, peeling, dishing and erosion are suppressed, a complex cleaning process and slurry supply/processing equipment are not required, and the cost of consumable items such as slurries and polishing pads is reduced A metal film formed on an insulating film comprising...http://www.google.com/patents/US7132367?utm_source=gb-gplus-sharePatent US7132367 - Polishing method
