A connection component is made by providing an assembly comprising a base layer of a dielectric material, a metal layer overlying the base layer, and a top layer of a plasma-etchable material overlying the metal layer; forming openings in the top layer to produce a top layer mask; and forming first conductive...http://www.google.com/patents/US6518160?utm_source=gb-gplus-sharePatent US6518160 - Method of manufacturing connection components using a plasma patterned mask
