Microelectromechanical system (MEMS) structures and arrays that provide movement in one, two, and/or three dimensions in response to selective thermal actuation. Significant amounts of scalable displacement are provided. In one embodiment, pairs of thermal arched beams are operably interconnected and...http://www.google.com/patents/US6218762?utm_source=gb-gplus-sharePatent US6218762 - Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays
