The present invention provides a semiconductor device including a plurality of wirings or conductive film patterns formed on a semiconductor substrate, and clearances are provided between the wirings or the conductive film patterns. On a corner or an end part of at least one of the wirings or the conductive...http://www.google.com/patents/US7067412?utm_source=gb-gplus-sharePatent US7067412 - Semiconductor device and method of manufacturing the same
