A method for fabricating an integrated infrared sensitive bolometer having a polycrystalline element whereby an oxide region deposited on silicon nitride covered with a first polysilicon layer which is etched to provide a location for a bolometer element. A second polysilicon layer is deposited and doped...http://www.google.com/patents/US5260225?utm_source=gb-gplus-sharePatent US5260225 - Integrated infrared sensitive bolometers
