An oscillatory angular rate MEMS sensor is described for sensing rotation about the “Z-axis”. Embodiments are either coupled-mass tuning-fork or single oscillating-mass in nature. The sensor includes mechanical and electrical function integration, and is preferably manufactured by a unique MEMS fabrication...http://www.google.com/patents/US20050066728?utm_source=gb-gplus-sharePatent US20050066728 - Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
