Prior to entering into manufacturing of a final production wafer, a series of test wafers are produced to analyze and test various structures. Each of the test wafers include a substrate, an insulating layer overlying the substrate, and a semi-conductive film layer formed over the insulating layer. The...http://www.google.com/patents/US6255125?utm_source=gb-gplus-sharePatent US6255125 - Method and apparatus for compensating for critical dimension variations in the production of a semiconductor wafer
