A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller...http://www.google.com/patents/US7114517?utm_source=gb-gplus-sharePatent US7114517 - High purity fluid delivery system
