A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine...http://www.google.com/patents/US20040100632?utm_source=gb-gplus-sharePatent US20040100632 - Focused beam spectroscopic ellipsometry method and system
