A reduced size, hermetically sealed semiconductor transducer and methods for fabricating the same. In a preferred embodiment, the transducer comprises a transducer wafer including a diaphragm which deflects upon the application of a force thereto. At least one semiconductor transducer element and one...http://www.google.com/patents/US6326682?utm_source=gb-gplus-sharePatent US6326682 - Hermetically sealed transducer and methods for producing the same
