An oversampling electromechanical modulator, including a micro-electromechanical sensor which has a first sensing capacitance and a second sensing capacitance and supplies an analog quantity correlated to the first sensing capacitance and to the second sensing capacitance; a converter stage, which supplies...http://www.google.com/patents/US20030025983?utm_source=gb-gplus-sharePatent US20030025983 - Self-calibrating oversampling electromechanical modulator and self-calibration method
