A method for monitoring at least one server in a semiconductor factory automation (FA) system, includes the steps of: a) providing server state information from at least one server to a real-time database, wherein the server state information includes an availability of a central processing unit, an...http://www.google.com/patents/US6859675?utm_source=gb-gplus-sharePatent US6859675 - Semiconductor factory automation system and method for monitoring at least one server in real time
