A plasma device includes a slot antenna (30) for supplying a high frequency electromagnetic field (F) supplied through a feeding part into a processing vessel (11). The feeding part has a cavity (35) for forming a resonator and converting the fed high frequency electromagnetic field (F) into a rotating...http://www.google.com/patents/US7243610?utm_source=gb-gplus-sharePatent US7243610 - Plasma device and plasma generating method
