A semiconductor device, which ensures device reliability especially in fine regions and enables great capacitance and high-speed operations, has memory cells including, in a first region of a main surface of a semiconductor substrate, a gate insulating film, a floating gate electrode, an interlayer insulating...http://www.google.com/patents/US7195976?utm_source=gb-gplus-sharePatent US7195976 - Non-volatile semiconductor memory and method of making same, and semiconductor device and method of making device
