The present invention relates to a method and system of inspecting a product, including extracting defects from the product, classifying the defects on the basis of information about the extracted defects representing the analogy of the defects, extracting the feature data of the defects on the basis...http://www.google.com/patents/US6546308?utm_source=gb-gplus-sharePatent US6546308 - Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
