A MEMS device such as a grating light valve™ light modulator is athermalized such that the force required to deflect the movable portion of the MEMS device remains constant over a range of temperatures. In MEMS embodiments directed to a grating light valve™ light modulator, a ribbon is suspended...http://www.google.com/patents/US6922272?utm_source=gb-gplus-sharePatent US6922272 - Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices
