A magnetic shunt assembly (12) for an exposure apparatus (10) includes a magnetic shunt assembly (12). The apparatus (10) includes an optical assembly (24)(26), a stage (44), a first mover assembly (16) that moves the stage (44) in a first gap (37). The first mover assembly (16) is surrounded by a magnetic...http://www.google.com/patents/US6794657?utm_source=gb-gplus-sharePatent US6794657 - Magnetic shunt assembly for an exposure apparatus
