An apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask, a display panel or a microoptical device. The apparatus includes a radiation source, a spatial modulator (SLM) having a multitude of modulating elements (pixels), a projection system, an electronic data processing...http://www.google.com/patents/US6504644?utm_source=gb-gplus-sharePatent US6504644 - Modulator design for pattern generator
