The invention relates to a vibrating microgyrometer incorporating a seismic mass (16) placed above a surface of a substrate (15) and attached to the surface by elastic supports arranged so as to enable the seismic mass (16) to move with respect to the substrate (15) in two directions x, y orthogonal...http://www.google.com/patents/US6089088?utm_source=gb-gplus-sharePatent US6089088 - Vibrating microgyrometer
