The present invention provides a method and apparatus for dispensing materials onto a substrate in a vacuum. In one embodiment, a dispensing system includes a dispensing vacuum chamber having an inlet to receive substrates for dispensing and an outlet to provide substrates having material dispensed thereon,...http://www.google.com/patents/US6119895?utm_source=gb-gplus-sharePatent US6119895 - Method and apparatus for dispensing materials in a vacuum
