A method of fabricating microstructural components, microparts assemblies and microparts is disclosed. The method includes fabricating a unidirectional metal matrix composite made of materials selected to allow precise etching of different structural elements of the given composite without damage to...http://www.google.com/patents/US7045069?utm_source=gb-gplus-sharePatent US7045069 - Microfabrication method based on metal matrix composite technology
