A fluctuation of a transistor characteristic is calculated based on deviation of the value measured for each of specified steps, and total fluctuation of the transistor characteristic is calculated for the previous steps prior to an annealing step. The processing temperature of the annealing step is...http://www.google.com/patents/US6469284?utm_source=gb-gplus-sharePatent US6469284 - Lamp annealer and method for controlling processing temperature thereof
