An electron spectroscopy apparatus in which pulses of EUV of a prescribed wavelength are generated from plasma produced by pulsed laser beam irradiation of a target containing specific elements, the EUV pulses are used to irradiate a specimen, producing an emission of photoelectrons from the specimen,...http://www.google.com/patents/US5569916?utm_source=gb-gplus-sharePatent US5569916 - Electron spectroscopy apparatus
