A low pressure process for making amorphous semiconductor alloy films and devices at high deposition rates and high gas conversion efficiencies utilizes microwave energy to form a deposition plasma. The alloys exhibit high-quality electronic properties suitable for many applications including photovoltaic...http://www.google.com/patents/US4504518?utm_source=gb-gplus-sharePatent US4504518 - Method of making amorphous semiconductor alloys and devices using microwave energy
