A capacitor has a lower electrode formed on an insulation layer, a dielectric layer formed on the lower electrode, an upper electrode layer formed on the dielectric layer, and a first protection layer pattern formed on the upper electrode layer. The upper electrode layer is etched using the first protection...http://www.google.com/patents/US7285813?utm_source=gb-gplus-sharePatent US7285813 - Metal-insulator-metal capacitor and method for manufacturing the same
