A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element....http://www.google.com/patents/US7944599?utm_source=gb-gplus-sharePatent US7944599 - Electromechanical device with optical function separated from mechanical and electrical function
