A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of spring members. The first and second electrodes are disposed on the substrate, and the anchor base surrounds...http://www.google.com/patents/US8104354?utm_source=gb-gplus-sharePatent US8104354 - Capacitive sensor and manufacturing method thereof
