Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils are described. In one method the springs used to form out-of-plane structures are constrained via a tether to avoid bunching and entanglement. The high yield structure may be used...http://www.google.com/patents/US6595787?utm_source=gb-gplus-sharePatent US6595787 - Low cost integrated out-of-plane micro-device structures and method of making
