A SMIF pod capable of supporting a cassette at points in the pod located directly over or near a kinematic coupling between the pod and a surface on which the pod is supported. Even if the pod shell warps or otherwise deforms, the three points of contact between the pod and the support surface at the...http://www.google.com/patents/US6398032?utm_source=gb-gplus-sharePatent US6398032 - SMIF pod including independently supported wafer cassette
