A method of growing, in a vapor phase, a gold film having high electro-migration resistance and a flat surface, and capable of being buried in contact holes disposed in an insulating film of an integrated circuit device, for example, at a practical growing rate. Dimethylgold hexafluoroacetylacetonato...http://www.google.com/patents/US5491005?utm_source=gb-gplus-sharePatent US5491005 - Gold thin film vapor growing method
