A reticle defect inspection apparatus that can carry out a defect inspection with high detection sensitivity are provided. The apparatus includes an optical system of transmitted illumination for irradiating one surface of a sample with a first inspection light, an optical system of reflected illumination...http://www.google.com/patents/US8072592?utm_source=gb-gplus-sharePatent US8072592 - Reticle defect inspection apparatus and reticle defect inspection method
