In a photoresist dispensing apparatus for use in manufacturing a semiconductor device, to coercively emit photoresist from a bottle by using a dispensing pump and to pass it through a supply line and a filter to obtain a filtering operation, and to spray the filtered photoresist to a wafer through a...http://www.google.com/patents/US7685963?utm_source=gb-gplus-sharePatent US7685963 - Method of and apparatus for dispensing photoresist in manufacturing semiconductor devices or the like
