A temperature control unit for independent control of a number of independent channels, as can exist with a cluster tool used for semiconductor fabrication, has high efficiency, long term life and reliability, and requires only a small floor area. To these ends, the unit employs a single high capacity...http://www.google.com/patents/US6247531?utm_source=gb-gplus-sharePatent US6247531 - Temperature control of individual tools in a cluster tool system
